电子学报 ›› 2000, Vol. 28 ›› Issue (12): 131-132.

• 论文 • 上一篇    

大面积双面外延YBCO超导薄膜研制

李言荣1, 陶伯万1, 刘兴钊1, 罗 安1, J.Geerk2, F.Ratzel2, R.Smithy2   

  1. 1. 电子科技大学,成都 610054;2. INFP,FZK of Karlsrule,Germany
  • 收稿日期:1999-11-29 修回日期:2000-04-24 出版日期:2000-12-25 发布日期:2000-12-25

Large Area Double-sided YBCO Epitaxial Superconducting Thin Film

LI Yan-rong1, TAO Bo-wan1, LIU Xing-zhao1, LUO An1, J.Geerk2, F.Ratzel2, R.Smithy2   

  1. 1. Institute of Information Material & Engineering,University of Electronic Science and Technology of China,Chengdu 610054,China;2. INFP,FZK of Karlsrule,Germany
  • Received:1999-11-29 Revised:2000-04-24 Online:2000-12-25 Published:2000-12-25

摘要: 本文通过倒筒式直流对靶溅射(ICP)方法,在3英寸范围内LaAlO3和蓝宝石(Al2O3)单晶基片上成功实现了两面同时沉积YBCO(YBa2Cu3Oy)高温超导外延薄膜,其TC0=88~91K,JC=1~5×106A/cm2,RS(77K,145GHz)=20~40mΩ,双面薄膜的两面一致性和面内均匀性都非常良好,可以满足微波器件研制的要求.

关键词: 高温超导, YBCO, 外延薄膜

Abstract: Epitaxial YBCO(YBa2Cu3Oy) thin film of large area sized at Φ30mm-3 inch are deposited at the same time on LaAlO3 and sapphire substrates by inverted cylindrical opposited target sputtering technology (ICP).These films show the values of TC0=88~91K,JC=1~5×106A/cm2,RS(77K,145GHz)=20~40mΩ.The homogeneity of film at any side and reproducibility of film at both sides are good enough,to be applicable in microwave devices.

Key words: superconductor, YBCO, thin film

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