@article{石艳玲_1914, author = {[石艳玲, 卿健, 李炜, 忻佩胜, 朱自强, 赖宗声]}, title = {低电压驱动的硅基Ka波段级联式MEMS移相器}, publisher = {电子学报}, year = {2003}, journal = {电子学报}, volume = {31}, number = {12}, eid = {1914}, pages = {1914-1916}, keywords = {微机械移相器;高阻硅;驱动电压;振动寿命}, url = https://www.ejournal.org.cn/CN/abstract/article_3013.shtml }