Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity

ZHAO Yi-xuan; LI Chang; ZHANG Xuan; PAN Ting-yang; DUAN Bing; YANG Da-quan

doi:10.12263/DZXB.20240414

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Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity

Special Focus: Recipient of CIE Outstanding Doctoral Dissertation | 更新时间：2025-12-08

- Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity
- ACTA ELECTRONICA SINICA Vol. 53, Issue 1, Pages: 41-50(2025)
- 作者机构：
  
  1.北京邮电大学信息光子学与光通信国家重点实验室，北京 100876
  2.北京邮电大学信息与通信工程学院，北京 100876
- 作者简介：
- 基金信息：
  
  Natural Science Foundation of Beijing Municipality(Z210004)
- DOI：10.12263/DZXB.20240414
  CLC： TP212.1;
- Received：07 May 2024，
  
  Revised：2024-11-10，
  
  Published：25 January 2025
- 稿件说明：
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赵义轩, 李昶, 张璇, 等. 超高品质因子微棒腔的制备封装及传感应用[J]. 电子学报, 2025, 53(01): 41-50.

ZHAO Yi-xuan, LI Chang, ZHANG Xuan, et al. Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity[J]. Acta Electronica Sinica, 2025, 53(01): 41-50.
赵义轩, 李昶, 张璇, 等. 超高品质因子微棒腔的制备封装及传感应用[J]. 电子学报, 2025, 53(01): 41-50. DOI：10.12263/DZXB.20240414

ZHAO Yi-xuan, LI Chang, ZHANG Xuan, et al. Fabrication, Packaging and Sensing Application of Ultra-High Quality Factor Microrod Cavity[J]. Acta Electronica Sinica, 2025, 53(01): 41-50. DOI：10.12263/DZXB.20240414

摘要

作为回音壁模式（Whispering Gallery Mode，WGM）光学微腔的重要参数之一，超高的品质因子意味着微腔可以在非线性光学、相干光通信以及微波光子学等领域具备更优异的特性，更广阔的应用前景.为了提高微腔的品质因子，本文基于自动化程序控制微腔制备，并优化了抛光以及退火工艺，所制备得到的二氧化硅微棒腔具有超高品质因子、低成本、高效率等特点，品质因子最高可达3×10

.基于集成温控的模块化封装方案，提高了微腔耦合系统的抗干扰能力，1 h的频率偏移量可以降低为原来的1/10.超高品质因子带来了超低的非线性效应阈值功率（低至266 μW），本文基于微棒腔产生的克尔光频梳进行了传感应用实验，实现了传感灵敏度为8.40 pm/℃，测量范围超过30 ℃的环境温度多模传感.本文的研究成果为高精度传感、大容量光通信、低阈值激光器等应用提供了强有力的工具.

Abstract

As one of the important parameters of the whispering gallery mode (WGM) optical microcavity

the high quality factor means that the microcavity can have better characteristics and broader application prospects in the fields of nonlinear optics

coherent optical communication and microwave photonics. In order to improve the quality factor of the microcavity

this paper controls the fabrication of the microcavity based on the automatic program

and optimized the polishing and annealing processes. The prepared silica microrod cavity has the characteristics of ultra-high quality factor

low cost and high efficiency

and the quality factor can reach up to 3×10

. Based on the modular package scheme

of integrated temperature control

the anti-interference ability of the microcavity coupling system is improved

and the frequency offset of one hour can be reduced by 10 times. With the ultra-low nonlinear threshold power (as low as 266 μW) brought by the ultra-high quality factor

this paper conducts sensing application experiments based on the Kerr optical frequency comb-generated by the microrod cavity

and realizes the multi-mode ambient temperature sensing with a sensing sensitivity of 8.40 pm/℃ and a measuring range of more than 30 ℃. The research results of this paper provide a powerful tool for high precision sensing

large capacity optical communication

low threshold laser and other applications.

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references

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