最新刊期
卷 36 ， 期 5 ， 2008
- 摘要：This paper first conducts rigorous sentence pattern analysis of questions based on the distance between question word and predicate,and then conduct shallow parse of answer candidate sentences.Based on the analysis,we extract question feature set;answer sentence feature set and combined feature set as our features for answer classification.Then we apply maximum entropy model and support vector machine to these features to train answer classifiers.The F-Measures of the two classifiers’ experiment conducted on five kinds of fact-based questions achieve 70.87% and 85.75% respectively.关键词：Chinese question answering;syntax analysis;answer extraction;maximum entropy model(MEM);support vector machine(SVM)2|2253|9更新时间：2025-07-16
- 摘要：While there are multiple images obtained by different sensors to measure the same object scene,one new multiscale image fusion algorithm based on probabilistic model is proposed.Its elementary idea is:Firstly,to decompose each sensor image into multiple subimages which compose a multiscale pyramid via wavelet packet transform,and to establish pixel-based subimage model on every level in the pyramid.Secondly,estimate the model parameters using least squares method based on the corresponding pixel of each level of the sensor image.Then,based on the model,derive estimation of the true scene using maximum posterior method.Finally,we may obtain global fusion estimate with the object scene by applying orderly inverse wavelet packet transformation to every local fusion estimate from each level of the pyramid.The result of fusing the visible image and infrared image shows that the proposed algorithm is valid.关键词：wavelet packet transform;probabilistic model;least squares;maximam a posteriori estimate3|1248|3更新时间：2025-07-16
- 摘要：A fast macroblock mode selection method in downscaling transcoder based on H.264 is proposed in this paper,which the total non-zero coefficients of responding four macroblocks in pre-coded frame is utilized as the criterion to select macroblock mode.We propose an exponent function model between threshold and re-quantization parameter (Th-Qr model).This model is converted into a linear regression model,and least square method is adopted to estimate parameters in the model.In the intra mode selection part,Th-Qr model is used to classify I4×4 or I16×16;In the inter mode selection part,Th-Qr model is used to classify the motion activity in downscaled frame,and different candidate macroblock modes are used according to classified motion activity areas.We compared the PSNR performance and computational complexity of proposed method with the full search algorithm.For the intra mode selection part,we can speed up about 4~5 times,and for the inter mode selection part,we can speed up about 35 times.关键词：video transcoder;H.264;macroblock decision;linear regression2|883|2更新时间：2025-07-16
- 摘要：The geometric properties of the Clifford Algebra including operations of the Clifford Product,the Projection and the Rejection are discussed in this paper.The Fourier Transform and its compute method in Clifford Algebra are introduced.Then the existence theorem of the Clifford Algebra is researches.Based on the existence theorem and the Clifford-Transform,the algorithm is proposed.The paper attempts to apply Clifford Algebra to handle the digital watermarking and the experimental results show that the algorithm has very good performance.关键词：Clifford algebra;Dlifford-Fourier transform;digital watermarking4|1100|4更新时间：2025-07-16
- 摘要：The philosophy of structural similarity is a new idea about image quality assessment.Different from the traditional paradigm which modeling the low level composition of Human Visual System (HVS) bottom-up,the new philosophy modes the functionality of the overall HVS from top to down.As an implementation of the new philosophy,the Structural SIMilarity (SSIM) index is simple and efficient.However,SSIM fails in measuring the badly distorted images and images with cross distortion types.In this paper,we interpret the structural information as the mid and high frequencies with enough energy,and regard the SSIM index as a better distortion measure of local areas.Then,a new image quality index based on Structural Information Extraction (SIExt) is proposed.In SIExt,structural information is separated from image and given higher weight,and SSIM is used as an error measure to estimate local distortions.Experimental results show that the proposed SIExt can assess the quality of images more accurate than PSNR and SSIM.关键词：image quality assessment;structural similarity(SSIM);structural information extraction(SIExt);human visual system(HVS)2|3026|29更新时间：2025-07-16
- 摘要：Trust model has become the focus of network security.The description of trust is given newly with fuzzy set theory for grid environment.In course of trust synthesis evaluation,direct interaction information of the middle recommendation node is presented,which expresses the importance of subjective factor.According to the dynamic character of trust,a new model of trust renewal is provided,which is based on the two factors of time-attenuation and path-attenuation.Experimental results show that the model is exact and robust.It can impel the further research of trust model.关键词：grid security;fuzzy set;trust evaluation;trust renewal2|1059|17更新时间：2025-07-16
- 摘要：This paper discusses the relationship between algebraic operations on Bloom filters and algebraic operations on data sets.This paper completely define algebraic operations including OR,AND,XOR,NOT,MINUS on Bloom filter,and study the membership query performance on Bloom filter and data set.Theoretical analyses and simulation results show that the Bloom filter ORed (ANDed) from the original Bloom filters can support element membership query on data set ORed (ANDed) from the original data sets,which can be a trick to real application.关键词：computer networks;distributed computing;distributed information system;set membership query;algebraic operations2|972|5更新时间：2025-07-16
- 摘要：Firstly,a linear programming based method is presented for modeling and solving the resource allocating problem in grid environments with heterogeneous resources.The approach discussed here regards resource sharing,job priorities,dependencies on multiple resource types,and algorithm specific policies.A grid service style architecture is then put forward for allocating of independent jobs with resources in a grid environment and a prototype implementation is described.The performance results show that linear programming based approach for resource allocating is efficient in speed and accuracy and can satisfy high job throughput rates.Also,the grid service style architecture makes the system scalable and extendable.关键词：resource allocation;grid service;job;optimization2|880|1更新时间：2025-07-16
- 摘要：This paper presents the general logic algorithm deduction based on the fractal theory model of optimal scanning architecture,research on the key technique of fractal scanning method in FPD (Flat Panel Display) gray scale controlling and the IP core designing.The studying content included the fractal scanning core scheme and n bits recurrence structure,creation and logic implementation of sub-space code sequences which can simplify hardware and raise anti-interference ability by applying the gray code locator.On the facts mentioned above,we have completed the fractal scanning IP(Intellective Property) core which can adapt to all kinds of gray scales,and the simulation results indicated that the designed IP core accords with the prearrange objective.The novel fractal scanning IP core embedded in FPD scanning controller can efficiently increase the scanning availability and the FPD imaging quality,and the more important fact is that the creationary control method gets the engineering implementation.关键词：flat panel display;optimal scanning architecture;fractal IP core;sub-space code;bit code;gray scale2|1055|5更新时间：2025-07-16
- 摘要：Traditional approach in RTL verification cannot completely verify the clock domain crossing (CDC) design of SoC.To solve this problem,we first propose a RTL module to model the actual effect of metastability.Then,linear temporal logic is proposed to model the specification of CDC designs.To solve the exponential problem in model checking,based on the characteristic of CDC designs,a strategy on input signal partition for the state transition’s characteristic function and a strategy on induction are proposed.Experiment results demonstrate that our method is useful to find CDC errors in the RTL verification stage and the verification time is approximately reduced from exponential to polynomial increased with the register size.关键词：formal verification;model checking;clock domain crossing design;linear temporal logic2|1842|5更新时间：2025-07-16
- 摘要：Workflow management systems provide a cooperative-work environment for the modern enterprises,which can availably manage enterprise business process and enhance its business competence.In order to efficiently manage the schedule of business processes,it is necessary to provide a schedule estimating method for workflow process model.The process modeled by workflow net based on Petri nets is difficult to be estimated for its schedule and total time directly.While in traditional schedule planning,the PERT diagram is an available technology.This paper introduces time concept into the workflow net and presents a transformation algorithm from LMST-invariant’s subnet to PERT diagram based on LMST-invariant decomposition.According to the resulting PERT diagram,the schedule and total time of workflow process model can estimated.2|1140|6更新时间：2025-07-16
- 摘要：Multiple-dimension scalable Stream Architecture (MASA) can be scalable in multiple dimensions.This paper discussed the scalability of MASA,and analyzed VLSI resource while scaling in inner-cluster,intra-cluster and multicore.The evaluating model was built by a set of kernels to test the performance of MASA.As presented in this paper,the efficiency of the stream processor architecture enables scaling to thousands of ALUs in a chip by the complementarities of the three dimensions.关键词：stream processor;stream architecture;scalability;parallel process2|994|1更新时间：2025-07-16
- 摘要：Traditional model predictive control is a one-degree-of-freedom controller,so good dynamic response performance of both set-point tracking and disturbance rejection characteristics can’t be achieved simultaneously.An improved model predictive control algorithm based on multi-degree-of-freedom performance index is proposed for the industrial plant to achieve good dynamic response performance of set-point tracking and disturbance rejection and model mismatch.The simulated results are given to demonstrate the effectiveness of the designed controller.关键词：model predictive control;multi-degree-of-freedom;dynamic matrix control2|949|3更新时间：2025-07-16
- 摘要：A method that employed CCD to measure radiant energy of furnace was proposed and corresponding measurement system was developed.The mechanism of measuring radiant energy with CCD was analyzed.A measurement model describing relationship between output voltage of CCD video camera and radiant energy was established.As the complexity and nonlinearity of the model,that would hinder the method from being put to practical use,and taking account of BP neural network capability of approximating any nonlinear function,a method of using BP neural network as measuring radiant energy model was presented.Experiments show that the method is feasible and has satisfactory measurement precision.关键词：charge coupled devices;measurement model;radiant energy;neural network;furnace2|909|1更新时间：2025-07-16
- 摘要：Eccentric Preissmann Scheme (EPS) is introduced to the analysis of high-speed interconnect lines,and a discrete model of interconnect lines is derived.An efficient difference scheme with second order accuracy is obtained by adjusting the eccentric parameters.Compared to the method of characteristics (MOC),EPS can be applied to the transient analysis of general interconnect lines,and it can efficiently improve the numerical oscillation phenomena after the discontinuity.关键词：eccentric Preissmann scheme;high-speed interconnect;very large scale integration;numerical computation2|880|0更新时间：2025-07-16
- 摘要：Sub-band coders have been applied widely in the image processing and speech signal processing.Two-channel multirate digital filter banks are the basic components of the tree-structured sub-band coders.This paper proposes the perfect reconstruction condition of two channel multirate filter banks in the fractional Fourier domain(FRFD),based on the theorem for FRFD analysis of signal sampling rate conversion and fractional convolution theory.Then,this paper illustrates that it is possible to design two-channel FIR Quadrature Mirror Filter Banks(QMFB)and Conjugate Quadrature Mirror Filter Banks(CQMFB)through the prototype filters of FIR QMFB and CQMFB in Fourier domain.The proposed theorems in this study advance the generalization of filter banks in FRFD,which are the bases of the applications of FRFT in the practices,such as image processing,speech signal processing,etc.Finally,the effectiveness of the proposed methods is verified by the simulations.关键词：the fractional Fourier transform;two channel filter banks;the signal polyphase representation;perfect reconstruction;the fractional convolution theory2|1183|4更新时间：2025-07-16
- 摘要：A Multi-Channel Correlation Fingerprinting (MCCF) method utilizing the amplifier’s non-linear property is proposed for specific emitter identification application.From amplifier’s Taylor series model,we derived the Carrier Component (CC) and Harmonic Component (HC) expressions of the output signal.Then the MCCF method based on the least square algorithm was developed by substituting the CC into the HC as an approximation of the input signal.The observation condition and estimation CRLB of MCCF were provided.The fingerprints of MCCF depend on the Taylor series model,and are independent of the input signals,so they are inherent.The feature extraction experiment of four FM broadcast emitters in Changsha area shows that,the MCCF method works well,even when the HC is 60 to 80dB smaller than the CC.2|1401|11更新时间：2025-07-16
- 摘要：Based on the small signal equivalent circuit of SiC MESFETs,the trapping effect has been investigated in detail.The elements of Rds ″ ,gm ″ and Css have been involved in and the trapping-emission mechanism is discussed in detail.Both positive and negative frequency dispersions of transconductance are simualted and analyzed with deep level traps located at the channel/buffer interface.The dispersion frequency is less than 1Hz at room temperature.However,with increasing temperature,the dispersion frequency increases can be of the order of MHz at 600K.By combining modeling techniques,material physics and self-heating effects,the influences of the applied voltage and self-heating effect are analyzed.The simulation indicates that the dispersion frequency increases with elevated temperature.The proposed model is valuable for the analysis of frequency dispersion in the device.关键词：silicon carbide;MESFET;deep level trap;frequency characteristics5|881|0更新时间：2025-07-16
- 摘要：With the research on the NoC deeper and deeper,it becomes a stringent task to map a complex application onto an appointed NoC platform efficiently.Based on 2-D mesh NoC platform,this paper sets up a united object function in order to optimize communication energy and execution time.It is also proposed that the delay can be optimized indirectly by means of optimizing distribution of link load,which can avoid the difficulty to model waiting time in NoC accurately.Ant colony algorithm is used to realize the energy-and delay-aware NoC mapping.Single object (energy/delay) or collaborate object can be selected to optimize the mapping by modifying parameter λ .Furthermore,the optimized solutions are simulated on NoC platform finally.Experimental results show single object optimization mapping can reduce communication energy and execution time by (30%~47%) and (20%~39%) respectively compared with random mapping.And collaborate object optimization mapping can provide a seductive tradeoff between energy and execution time.关键词：network on a chip(NoC);mapping;energy;delay;ant colony algorithm2|1587|43更新时间：2025-07-16
- 摘要：With the advance of the modeling of the device-level behaviors for the MEMS systems,characterizations for the package-level behaviors are becoming important.Results from either experimental or numerical studies have already validated the thermally-induced package effects on the performance and reliability of MEMS systems,while the theoretical descriptions for these effects are still lacked.In this paper,a theoretical joint model for the whole packaged MEMS system is established based on the Cell Library Concept and the Nodal Analysis Method to enable the package-level simulations for the designed devices.Cases of conventional package-device systems are studied to demonstrate the application of this joint model,and the results agree well with the FEM calculations.The challenges for the design of package-level MEMS systems are finally discussed.关键词：MEMS(microelectromechanical system);thermally induced package effect;resonant;cell library concept;nodal analysis method2|860|1更新时间：2025-07-16
- 摘要：This paper discussed and reviewed various routing mechanisms and algorithms of the content-based publish-subscribe systems.By the client mobility and dynamically changed network topology the routing algorithms were classified,with their basic ideas,merits and shortages described in details respectively.According to the characters of dynamics,loose coupling,and many-many communication in the publish-subscribe systems,some unsolved problems were introduced and analyzed for the future research.关键词：publish-subscribe systems;routing algorithms;network topology;event brokering network2|1602|5更新时间：2025-07-16
-
Survey on the Latest Development of Pedestrian Detection System and Its Key Technologies Expectation
摘要：Pedestrian detection system (PDS) is an active safety technique which guarantees pedestrians and vehicles safety.It has become a hot research topic and made good progresse in the latest 5 years with the development and application of sensor technologies,kernel algorithms and so on.Different with other PDS survey papers,this paper surveys the major works in this field during the last five years from the aspects of techniques and prototype systems;some problems are pointed out and analyzed to be solved.The expectation of the future work is given at the end.关键词：pedestrian detection system;feature selection;classification mechanism;multi-sensor fusion2|3548|9更新时间：2025-07-16 - 摘要：Search Engine is an important means,which people looked for their requirement information.Then the measurement methods also turn to an important research course.This article deeply analyses the development status of search engine retrieve performance measurement in the native and abroad,then a measurement method based user path model was established.The user action model was researched form user retrieve action,and then the user path map rule is put forward.Furthermore,the evaluation process of search engine retrieve performance was described,and defined measurement method of successful search.Last,through the accomplishment of evaluation platform,the practice signification was proofed.关键词：search engine;retrieve performance measurement;user path;successful search2|946|0更新时间：2025-07-16
- 摘要：Aiming at the bad performance of existing retinal blood vessel segmentation methods for small and low contrast vessels,a new segmentation method based on transition region extraction is proposed.Firstly,the two-dimensional Gaussian matched filter is used to enhance the retinal image.Then the main vessels are segmented through optimal entropy method and the transition region is extracted by algorithm based on distributed genetic algorithm and Otsu.Finally,the vessels are obtained via analyzing the region connectivity.The experiments implemented on the Hoover database indicate that the proposed method outperforms the Hoover algorithm on the small vessels extraction,connectivity and effectiveness.In addition,the efficiency of this method could be improved by introducing the distributed genetic algorithm based on migration strategy.关键词：blood vessel segmentation;transition region;optimal entropy;distributed genetic algorithm;Otsu4|1787|10更新时间：2025-07-16
- 摘要：This paper makes a new definition on image noise according to two features of noise known as the random and fuzzy after the analysis of the progress of image noise production.Following that a new image noise removal algorithm based on the measuring of medium truth scale is given.By sample simulation and classical PSNR evaluation,it shows the image noise removal algorithm based on measuring of medium truth scale brings about a better noise removal effect compared with the classic one,which will lead to its practicable and effective applications in noise removal and image restoration.In addition,a new measuring method of fidelity of image based on image entropy is introduced in this paper to reduce the common deviation between the classical assessment results such as PNSR and the human subjective perception as well as its validity is proved by a sample assessment.关键词：image noise;medium truth scale;noise removal algorithm;medium entropy;measuring of fidelity2|1217|4更新时间：2025-07-16
- 摘要：Application-specific instructions play an important role in reducing code size and improving performance for embedded processors.Automating the design process of these instructions can shorten the time-to-market of the product.This paper proposes a fully automatic approach on instruction-set extension for embedded applications and a new algorithm for instruction pattern mapping.Experimental results show great performance improvement on various embedded applications under given hardware constraints.关键词：embedded application;instruction-set extension;automatic generation4|924|5更新时间：2025-07-16
- 摘要：Gene expression profiles of gastric cancer and counterpart normal tissues were analyzed with bioinformatics and machine learning methods to address the problem of discovery of biomarker genes and model of the tumor molecular diagnosis.Firstly,a support vector machine (SVM) was employed to find the feature gene subset with best classification performance for distinguishing cancerous tissues and the counterparts.And then,using genetic algorithm filter feature genes based on the classification rate of SVM.The decision tree was employed to extract rule subsets from the feature genes.These rules were tested by the test dataset with cross validation method,and the diagnosis model was constructed with these rules.The results indicate the gastric biomarkers and the diagnosis model would give more instruction in biological experiments and clinical diagnosis reference model.关键词：gastric cancer;genetic algorithm;decision tree;support vector machine2|991|4更新时间：2025-07-16
- 摘要：A new algorithm based on XNOR/OR logic for searching the best polarity for low power dissipation has been proposed,by investigating the XNOR/OR logical expression,the propagation algorithm of signal probability and the polarity conversion algorithm.Since the cost function in this algorithm includes the power and the area,both of the power and the area can be optimized simultaneously.The results of testing ten circuits from MCNC Benchmark show that this algorithm is very effective to search the best polarity:the XNOR/OR circuits under the polarity searched by this algorithm have achieved average power-saving and area-saving,68.4% and 34.2%,respectively,compared with those circuits under polarity 0.关键词：XNOR/OR logic;low power;polarity conversion;algorithm2|817|9更新时间：2025-07-16
- 摘要：Based on the conventional lumped parameter circuit model,network equations of piezoelectric transformers (PTs) in parallel-parallel,parallel-series,series-parallel and series-series connection are set up using Y parameter, G parameter, H parameter and Z parameter respectively.All equations are then transformed into Y parameter form,which directly exhibit the relationship between the network characteristics and parameters of single PT and the number of connected PTs.Finally,simulation of electrical characteristics of PTs connected in the four ways is performed,and the theoretical analysis is verified by experiments of parallel-parallel connection.It shows that,only the parallel-parallel connection and parallel-series connection can increase voltage gain and output power.关键词：piezoelectric transformer;two-port network;voltage gain;output power2|880|3更新时间：2025-07-16
- 摘要：A new type of piezoelectric composite ultrasonic transducers with high frequency in radial vibration is studied.It is composed of a piezoelectric ceramic ring and a metal disk which is inserted in the inner of the ceramic ring.First,the radial vibration of a piezoelectric ring and a metal disk is analyzed;its electro-mechanical equivalent circuit and the resonance frequency equation are obtained.It is illustrated that when the radius ratio is increased,the resonance and anti-resonance frequency of a piezoelectric ceramic ring is decreased.This means that the resonance frequency of a piezoelectric disk is larger that that of a piezoelectric ring with the same outer radius.Then,the radial vibration of the composite transducer is studied;its compound electro-mechanical equivalent circuit and the frequency equation are given.It is shown that when a metal disk is inserted into the center of a piezoelectric ring,its resonance frequency is higher than that of a piezoelectric ring or a disk.This means that the composite radial piezoelectric transducer can produce radial vibration at high resonance frequency.Experiments show that the measured resonance frequency is in a good agreement with the theoretical results.关键词：radial vibration;electro-mechanical equivalent circuit;piezoelectric ceramic;transducer with high frequency;resonance frequency2|1504|3更新时间：2025-07-16
- 摘要：This paper proposes a nonlinear principle component analysis (PCA)cost function for blind separation of convolutive mixtures.Then a new recursive least-squares (RLS) algorithm is developed in time domain.This algorithm has two stages:one is whitening,the other is RLS iteration.Also,the algorithm does not suffer from the problems of frequency domain based algorithms on arbitrary scaling and permutations in different frequency components.Simulations show that this algorithm can successfully separate mixing signals and has fast convergence.关键词：blind source separation;convolutive mixtures;nonlinear PCA2|989|4更新时间：2025-07-16
- 摘要：A five layers wideband embedded variable bit-rate speech coding algorithm at 8~32kb/s was proposed in this paper based on algebraic code-excited linear prediction (ACELP) and transform coded excitation (TCX) speech coding techniques.The first three layers at 8kb/s,12kb/s and 16 kb/s are embedded by ACELP coding model,while the last two layers at 24 kb/s and 32 kb/s are embedded with TCX technique.The test result indicates that the quality of the embedded speech coding algorithm with five layers is close to Terms of Reference(TOR) for ITU-T G.VBR codec for clean speech,speech with office noise and switching between layers.关键词：speech coding;embedded speech coding;ACELP coding;TCX coding4|804|1更新时间：2025-07-16
- 摘要：The main obstacle to the application of image sparse representation nowadays is the enormous computational complexity.Based on the estimation of the dictionary cross-correlation information,an improved matching pursuit algorithm is proposed for image approximation.At each iteration,the adaptive prediction is introduced to effectively reduce the inner product computation load.Meanwhile,the number of iterations is decreased significantly by picking a group of atoms at a time.As a result,the total computational complexity is greatly reduced.Experimental results show that the proposed algorithm yields a significant speed improvement over the original one,while maintaining the approximation quality.For instance,it achieves a speed-up gain of near 43 times when performing 800 atoms decomposition.The algorithm is applied to image coding and shown to provide results comparable to JPEG2000 at low bitrate.关键词：sparse representation;matching pursuit;cross-correlation2|838|1更新时间：2025-07-16
- 摘要：In this paper,we propose a coarse-to-fine pedestrian detection based on feature transformation and SVM with a monocular moving camera.In this method,a coarse pedestrian detector is learnt by Look-Up Table (LUT) Gentle AdaBoost cascade.Then each stage classifier in coarse detector is taken as a feature,and a fine pedestrian detector based on those features is learnt with SVM from those training data which pass through the coarse pedestrian detector.The detection results by this detector are refined by temporal analysis using the color and spatial information of each detection results to improved pedestrian detection rate and decrease the false alarm rate.Experimental results show our method high performance.关键词：pedestrian detection;support vector machine(SVM);Gentle Adaboost;temporal analysis2|1166|10更新时间：2025-07-16
- 摘要：Presently existing synthesis methods for reversible circuits were applicable only to reversible circuits with small numbers of inputs and outputs and had neglected the impact of path delay,which could not meet the complex design.The heuristic Synthesis algorithm is presented in this paper.Based on matrix model and symbolic algebra,this paper offers a symbolic synthesis method and performs delay and crosstalk optimization simultaneously.Using the cost function the method steers the synthesis process,which considers multiple optimization objectives,including area,delay and crosstalk.The proposed algorithm was tested on a set of reversible benchmarks.Compared with existing synthesis methods,the algorithm reduces crosstalk by 10.3% and path delay by 5-20%.It has obvious advantages for CPU time and memory cost.The method can handle large scale reversible circuits in reasonable time.关键词：logic synthesis;reversible circuits;delay;crosstalk2|931|2更新时间：2025-07-16
- 摘要：The combs of the comb capacitive inertial sensors fabricated by a deep reactive ion etching (DRIE) are usually not parallel.In this paper,inertial pulse response of MEMS capacitive accelerometer with non-parallel combs is studied considering the air damping in low vacuum,and the effects of DRIE process on performance of the micro-accelerometer are analyzed.The results show that for double-sided structure,the non-parallel comb factor influences the displacement caused by outside acceleration and decreases the linearity range of inertial pulse response of the sensors,as the air pressure becomes smaller,the effects are more obvious.For double-sided structure with feedback voltage,the feedback force decreases the sensitivity of pulse inertial signal,but the effects of DRIE on the performances of the sensor become smaller compared to the structure without feedback voltage.To restrain the non-parallel factor of DRIE process,a novel MEMS capacitive accelerometer structure is proposed,and the primary performance is analyzed by FEM tool ANSYS and the detailed fabricated process is designed.关键词：high precision micro-accelerometer;non-parallel combs;inertial pulse response;MEMS2|1211|10更新时间：2025-07-16
- Technical support is provided by Beijing Founder electronics co., LTD 京ICP备09064830号-19
京公网安备11010802024621 - It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
- Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.
0