A Review on MEMS/NEMS-Based Biosensor

LI Du-juan, CHEN Hui-yi, LIU Chao-ran, FAN Kai, WANG Gao-feng

ACTA ELECTRONICA SINICA ›› 2021, Vol. 49 ›› Issue (6) : 1228-1236.

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ACTA ELECTRONICA SINICA ›› 2021, Vol. 49 ›› Issue (6) : 1228-1236. DOI: 10.12263/DZXB.20200266
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A Review on MEMS/NEMS-Based Biosensor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 49(6): 1228-1236. https://doi.org/10.12263/DZXB.20200266

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