The Performance Improvement of Thin Film Bulk Acoustic Resonators by Frame Structure

WU Yong-le, WU Hao-peng, LAI Zhi-guo, CAI Xun, TANG Bin, YANG Qing-hua, YANG Yu-hao, WANG Wei-min

ACTA ELECTRONICA SINICA ›› 2024, Vol. 52 ›› Issue (2) : 407-413.

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ACTA ELECTRONICA SINICA ›› 2024, Vol. 52 ›› Issue (2) : 407-413. DOI: 10.12263/DZXB.20220346
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The Performance Improvement of Thin Film Bulk Acoustic Resonators by Frame Structure

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 52(2): 407-413. https://doi.org/10.12263/DZXB.20220346

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