Study on the Silicon-on-Insulator Power Semiconductor Monolithic Integration Technology

ZHANG Long, LIU Si-yang, SUN Wei-feng, MA Jie, PAN Cheng-wu, HE Nai-long, ZHANG Sen, SU Wei

ACTA ELECTRONICA SINICA ›› 2023, Vol. 51 ›› Issue (2) : 514-526.

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ACTA ELECTRONICA SINICA ›› 2023, Vol. 51 ›› Issue (2) : 514-526. DOI: 10.12263/DZXB.20220492
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Study on the Silicon-on-Insulator Power Semiconductor Monolithic Integration Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 51(2): 514-526. https://doi.org/10.12263/DZXB.20220492

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