Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators

ZHAO Ji-cong, LÜ Shi-tao, ZHANG Ao-yu, SONG Chen-guang, SUN Hai-yan

ACTA ELECTRONICA SINICA ›› 2023, Vol. 51 ›› Issue (1) : 222-230.

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ACTA ELECTRONICA SINICA ›› 2023, Vol. 51 ›› Issue (1) : 222-230. DOI: 10.12263/DZXB.20220897
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Analysis and Research on Energy Loss of Aluminum Nitride Lamb Wave Resonators

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 51(1): 222-230. https://doi.org/10.12263/DZXB.20220897

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