Secondary Electron Characteristics of Dielectrics with Buried Structures in SEM

HAO Jie, LI Wei-qin, QIAN Jun

ACTA ELECTRONICA SINICA ›› 2015, Vol. 43 ›› Issue (5) : 1028-1034.

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ACTA ELECTRONICA SINICA ›› 2015, Vol. 43 ›› Issue (5) : 1028-1034. DOI: 10.3969/j.issn.0372-2112.2015.05.029

Secondary Electron Characteristics of Dielectrics with Buried Structures in SEM

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 43(5): 1028-1034. https://doi.org/10.3969/j.issn.0372-2112.2015.05.029

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