A DBR and ANFIS Integrated Dynamic Scheduling Algorithm for Semiconductor Wafer Fabrication

doi:10.3969/j.issn.0372-2112.2015.10.030

CAO Zheng-cai, PENG Ya-zhen, LI Bo, LIU Min

ACTA ELECTRONICA SINICA ›› 2015, Vol. 43 ›› Issue (10) : 2082-2087.

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ACTA ELECTRONICA SINICA ›› 2015, Vol. 43 ›› Issue (10) : 2082-2087. DOI: 10.3969/j.issn.0372-2112.2015.10.030

A DBR and ANFIS Integrated Dynamic Scheduling Algorithm for Semiconductor Wafer Fabrication

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 43(10): 2082-2087. https://doi.org/10.3969/j.issn.0372-2112.2015.10.030

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Received	Revised	Published
2012-03-17	2013-09-15	2015-10-25
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2015-10-25

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