A New Type Capacitive MEMS Accelerometer Digital Interface Circuit Design

doi:10.3969/j.issn.0372-2112.2016.10.032

LI Zong-wei, CONG Ning, XIONG Xing-yin, HAN Ke-du, YANG Chang-chun

Acta Electronica Sinica ›› 2016, Vol. 44 ›› Issue (10) : 2507-2513.

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Acta Electronica Sinica ›› 2016, Vol. 44 ›› Issue (10) : 2507-2513. DOI: 10.3969/j.issn.0372-2112.2016.10.032

A New Type Capacitive MEMS Accelerometer Digital Interface Circuit Design

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 44(10): 2507-2513 https://doi.org/10.3969/j.issn.0372-2112.2016.10.032

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Received	Revised	Published
2015-08-19	2016-02-18	2016-10-25
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2016-10-25

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