Study on the Time Domain Sputtering Effect and Scattering of Slot Arrays of Different Sizes

HOU Hai-jian, LI Da-wei, WANG Jun-hong

ACTA ELECTRONICA SINICA ›› 2018, Vol. 46 ›› Issue (8) : 2030-2034.

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ACTA ELECTRONICA SINICA ›› 2018, Vol. 46 ›› Issue (8) : 2030-2034. DOI: 10.3969/j.issn.0372-2112.2018.08.032

Study on the Time Domain Sputtering Effect and Scattering of Slot Arrays of Different Sizes

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 46(8): 2030-2034. https://doi.org/10.3969/j.issn.0372-2112.2018.08.032

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