Self-aligned AlGaAs/GaAs HBT with Micro-airbridge Isolation

Self-aligned AlGaAs/GaAs HBT with Micro-airbridge Isolation

YAN Bei-ping;ZHANG He-ming;DAI Xian-ying

Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (11) : 132-134.

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PDF(172 KB)

Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (11) : 132-134.

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Self-aligned AlGaAs/GaAs HBT with Micro-airbridge Isolation

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 28(11): 132-134

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