Modeling for Charging Effect during RIE Processing

Modeling for Charging Effect during RIE Processing

HU Heng-sheng;ZHANG Min

ACTA ELECTRONICA SINICA ›› 2000, Vol. 28 ›› Issue (11) : 81-83.

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PDF(193 KB)

ACTA ELECTRONICA SINICA ›› 2000, Vol. 28 ›› Issue (11) : 81-83.

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Modeling for Charging Effect during RIE Processing

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 28(11): 81-83.

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