Prospect on the Applicatoin of Low-k Dielectric in ULSI

Prospect on the Applicatoin of Low-k Dielectric in ULSI

RUAN Gang;XIAO Xia;ZHU Zhao-min

ACTA ELECTRONICA SINICA ›› 2000, Vol. 28 ›› Issue (11) : 84-87.

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PDF(132 KB)

ACTA ELECTRONICA SINICA ›› 2000, Vol. 28 ›› Issue (11) : 84-87.

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Prospect on the Applicatoin of Low-k Dielectric in ULSI

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 28(11): 84-87.

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