Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers
Hu Ming;B.Shen;W.Allegretto;A.M.Robinson
Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (2) : 122-123.
Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers
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