A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor

YAO Zhen-hua;ZHU Chang-chun;CHENG Min;LIU Jun-hua

ACTA ELECTRONICA SINICA ›› 2000, Vol. 28 ›› Issue (2) : 59-61.

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ACTA ELECTRONICA SINICA ›› 2000, Vol. 28 ›› Issue (2) : 59-61.
论文

A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor

  • YAO Zhen-hua, ZHU Chang-chun, CHENG Min, LIU Jun-hua
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Abstract

We research on the thermal buckling characteristics of double layer membrane which is composed of different materials with different thermal expansion coefficiens under uniform temperature elevation.The energy method is proposed which is used to solve the problem and the symbolic relation between central buckling height and substrate height under small buckling height is also given.It is the primary theory of membrane resonant sensor,which makes the research and development of novel thermal sensor possible.

Key words

membrane micro-machine / resonance sensor / double layer membrance / thermal buckling / uniform temperature elevation

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YAO Zhen-hua;ZHU Chang-chun;CHENG Min;LIU Jun-hua. A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor[J]. Acta Electronica Sinica, 2000, 28(2): 59-61.
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