A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor

YAO Zhen-hua;ZHU Chang-chun;CHENG Min;LIU Jun-hua

Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (2) : 59-61.

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Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (2) : 59-61.
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A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 28(2): 59-61

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