Quality Evaluation of Thin Dielectric Film by TDDB Measurements

Quality Evaluation of Thin Dielectric Film by TDDB Measurements

HU Heng-sheng;ZHANG Min;LIN Li-jin

Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (5) : 80-83.

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PDF(228 KB)

Acta Electronica Sinica ›› 2000, Vol. 28 ›› Issue (5) : 80-83.

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Quality Evaluation of Thin Dielectric Film by TDDB Measurements

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2000, 28(5): 80-83

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