Relation Between the Reliability of Thin Dielectric Film and Statistical Analysis of Traps

Relation Between the Reliability of Thin Dielectric Film and Statistical Analysis of Traps

YAO Feng-ying;HU Heng-sheng;ZHANG Min

ACTA ELECTRONICA SINICA ›› 2001, Vol. 29 ›› Issue (11) : 1522-1525.

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PDF(170 KB)

ACTA ELECTRONICA SINICA ›› 2001, Vol. 29 ›› Issue (11) : 1522-1525.

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Relation Between the Reliability of Thin Dielectric Film and Statistical Analysis of Traps

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 29(11): 1522-1525.

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