On-Wafer Measurement Techniques Using Coplanar Microwave Probe

On-Wafer Measurement Techniques Using Coplanar Microwave Probe

SUN Wei;TIAN Xiao-jian;HE Wei-yu;ZHANG Da-ming;LI De-hui;YI Mao-bin

Acta Electronica Sinica ›› 2001, Vol. 29 ›› Issue (2) : 222-224.

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PDF(170 KB)

Acta Electronica Sinica ›› 2001, Vol. 29 ›› Issue (2) : 222-224.

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On-Wafer Measurement Techniques Using Coplanar Microwave Probe

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 29(2): 222-224

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