HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature

NIU Wen-cheng;SUN Xue-zhu;WU Xiao-ye;LI Hua-wei;NA Xing-bo;YU Mei;CHEN Xing-wu;ZHANG Fu-hai;XIE Jian-xiang

Acta Electronica Sinica ›› 2001, Vol. 29 ›› Issue (5) : 604-606.

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Acta Electronica Sinica ›› 2001, Vol. 29 ›› Issue (5) : 604-606.
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HSGFET Ozone Sensor with Dual Sensitive Layer Operating at Room Temperature

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 29(5): 604-606

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