Study on Controlling the Concentrations of Dissolved Oxygen and Total Organic Carbon in Water Used for ULSI

Study on Controlling the Concentrations of Dissolved Oxygen and Total Organic Carbon in Water Used for ULSI

WEN Rui-mei;CHEN Shen-li

ACTA ELECTRONICA SINICA ›› 2001, Vol. 29 ›› Issue (8) : 1009-1012.

PDF(223 KB)

PDF(223 KB)

ACTA ELECTRONICA SINICA ›› 2001, Vol. 29 ›› Issue (8) : 1009-1012.

论文

Study on Controlling the Concentrations of Dissolved Oxygen and Total Organic Carbon in Water Used for ULSI

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2001, 29(8): 1009-1012.

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

PDF(223 KB)

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉