Study of Silicon-Based MEMS Technology and Its Standard Process

WANG Yang-yuan;WU Guo-ying;HAO Yi-long;ZHANG Da-cheng;XIAO Zhi-xiong;LI Ting;ZHANG Guo-bing;ZHANG Jin-wen

Acta Electronica Sinica ›› 2002, Vol. 30 ›› Issue (11) : 1577-1584.

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Acta Electronica Sinica ›› 2002, Vol. 30 ›› Issue (11) : 1577-1584.
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Study of Silicon-Based MEMS Technology and Its Standard Process

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2002, 30(11): 1577-1584

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