Design and Fabrication of Silicon Micromachining Suspended Inductor
DING Yong;LIU Ze-wen;LIU Li-tian;LI Zhi-jian
Acta Electronica Sinica ›› 2002, Vol. 30 ›› Issue (11) : 1597-1600.
Design and Fabrication of Silicon Micromachining Suspended Inductor
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