An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication

WEN Rui-Mei;LIANG Jun-Wu

ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (11) : 1601-1604.

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ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (11) : 1601-1604.
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An Energy Transfer Photochemical Model for the Abatement of Total Organic Carbon in High Purity Water Used in ULSI Fabrication

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 31(11): 1601-1604.

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