Research on Poly-Silicon Integrated Pressure Sensor for High Temperature

Research on Poly-Silicon Integrated Pressure Sensor for High Temperature

ZHANG Wei;WANG Yang-yuan

Acta Electronica Sinica ›› 2003, Vol. 31 ›› Issue (11) : 1736-1738.

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PDF(213 KB)

Acta Electronica Sinica ›› 2003, Vol. 31 ›› Issue (11) : 1736-1738.

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Research on Poly-Silicon Integrated Pressure Sensor for High Temperature

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 31(11): 1736-1738

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