MEMS Distributed Phase Shifter on High-Resistivity Silicon with Low Pull-Down Voltage

SHI Yan-ling;QING Jian;LI Wei;XIN Pei-sheng;ZHU Zi-qiang;LAI Zong-sheng

ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (12) : 1914-1916.

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ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (12) : 1914-1916.
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MEMS Distributed Phase Shifter on High-Resistivity Silicon with Low Pull-Down Voltage

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 31(12): 1914-1916.

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