Low-Temperature Metal-Induced Laterally Crystallized Polycrystalline Silicon Material and Device Technology

Low-Temperature Metal-Induced Laterally Crystallized Polycrystalline Silicon Material and Device Technology

WANG Wen;MENG Zhi-guo

ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (5) : 662-666.

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PDF(254 KB)

ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (5) : 662-666.

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Low-Temperature Metal-Induced Laterally Crystallized Polycrystalline Silicon Material and Device Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 31(5): 662-666.

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