Silica Removal from Purified Water Produced for MOVPE Process

Silica Removal from Purified Water Produced for MOVPE Process

WEN Rui-mei;XU Zhi-biao;MENG Guang-zhen;WU Jian

ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (5) : 721-723.

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PDF(162 KB)

ACTA ELECTRONICA SINICA ›› 2003, Vol. 31 ›› Issue (5) : 721-723.

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Silica Removal from Purified Water Produced for MOVPE Process

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2003, 31(5): 721-723.

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