Microstructure and Reliability of ULSI Copper Interconnects
WANG Xiao-dong;JI Yuan;LI Zhi-guo;LU Zhen-jun;XIA Yang;LIU Dan-min;XIAO Wei-qiang
Acta Electronica Sinica ›› 2004, Vol. 32 ›› Issue (8) : 1302-1304.
Microstructure and Reliability of ULSI Copper Interconnects
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