Structural Study of Microcrystalline Silicon Films Fabricated by VHF-PECVD at Different Substrate Temperatures

ZHANG Xiao-dan, ZHAO Ying, GAO Yan-tao, ZHU Feng, WEI Chang-chun, SUN Jian, GENG Xin-hua, XIONG Shao-zhen

ACTA ELECTRONICA SINICA ›› 2005, Vol. 33 ›› Issue (5) : 920-922.

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ACTA ELECTRONICA SINICA ›› 2005, Vol. 33 ›› Issue (5) : 920-922.

Structural Study of Microcrystalline Silicon Films Fabricated by VHF-PECVD at Different Substrate Temperatures

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2005, 33(5): 920-922.

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