Rectangular Defect Model and Critical Area Computation of Real Defect Outlines in VLSI

Rectangular Defect Model and Critical Area Computation of Real Defect Outlines in VLSI

WANG Jun-ping, HAO Yue

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (11) : 1974-1977.

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ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (11) : 1974-1977.

Rectangular Defect Model and Critical Area Computation of Real Defect Outlines in VLSI

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 34(11): 1974-1977.

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