Estimating the Fractal Dimension of IC Defect Outline by Wavelet

Estimating the Fractal Dimension of IC Defect Outline by Wavelet

SUN Xiao-li, HAO Yue, SONG Guo-xiang

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (8) : 1485-1487.

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PDF(234 KB)

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (8) : 1485-1487.

Estimating the Fractal Dimension of IC Defect Outline by Wavelet

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 34(8): 1485-1487.

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