Study on the Impact of Germanium Preamorphization on the Work Function of Fully Silicided NiSi Gate

CAI Yi-mao, HUANG Ru, SHAN Xiao-nan, ZHOU Fa-long, WANG Yang-yuan

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (8) : 1534-1536.

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ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (8) : 1534-1536.

Study on the Impact of Germanium Preamorphization on the Work Function of Fully Silicided NiSi Gate

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 34(8): 1534-1536.

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