On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films

On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films

QI Li-na, HUANG Qing-an, LI Wei-hua

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (8) : 1549-1552.

PDF(641 KB)

PDF(641 KB)

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (8) : 1549-1552.

On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 34(8): 1549-1552.

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

PDF(641 KB)

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉