On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films

On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films

QI Li-na, HUANG Qing-an, LI Wei-hua

Acta Electronica Sinica ›› 2006, Vol. 34 ›› Issue (8) : 1549-1552.

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PDF(641 KB)

Acta Electronica Sinica ›› 2006, Vol. 34 ›› Issue (8) : 1549-1552.

On-Line Extraction for Thermal Diffusivity of Surface-Micromachined Polysilicon Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 34(8): 1549-1552

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