Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication

Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication

CAO Zheng-cai, QIAO Fei, WU Qi-di

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (S1) : 2518-2525.

PDF(369 KB)

PDF(369 KB)

ACTA ELECTRONICA SINICA ›› 2006, Vol. 34 ›› Issue (S1) : 2518-2525.

Research Progress of Modeling Methods and Scheduling Strategies for Semiconductor Wafer Fabrication

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2006, 34(S1): 2518-2525.

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