A Method for In-Situ Measuring Average Stress Gradient and Elastic Modulus of a MEMS Film

A Method for In-Situ Measuring Average Stress Gradient and Elastic Modulus of a MEMS Film

RONG Hua, HUANG Qing-an, WANG Ming

ACTA ELECTRONICA SINICA ›› 2007, Vol. 35 ›› Issue (2) : 311-314.

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PDF(313 KB)

ACTA ELECTRONICA SINICA ›› 2007, Vol. 35 ›› Issue (2) : 311-314.

A Method for In-Situ Measuring Average Stress Gradient and Elastic Modulus of a MEMS Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 35(2): 311-314.

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