Multiple-dimension scalable Stream Architecture (MASA) can be scalable in multiple dimensions.This paper discussed the scalability of MASA,and analyzed VLSI resource while scaling in inner-cluster,intra-cluster and multicore.The evaluating model was built by a set of kernels to test the performance of MASA.As presented in this paper,the efficiency of the stream processor architecture enables scaling to thousands of ALUs in a chip by the complementarities of the three dimensions.