Adaptive Inverse Control Strategy and Its Application in IC Material Slicing Equipment
TANG Rui;LIU Hong-Li;DAI Yu-xing;ZHANG Yi-bing;JIANG Jin
Acta Electronica Sinica ›› 2009, Vol. 37 ›› Issue (11) : 2480-2483.
Adaptive Inverse Control Strategy and Its Application in IC Material Slicing Equipment
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