Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

CAO Zheng-cai;YU Hong-xia;QIAO Fei

Acta Electronica Sinica ›› 2010, Vol. 38 ›› Issue (2) : 340-344.

PDF(2701 KB)

PDF(2701 KB)

Acta Electronica Sinica ›› 2010, Vol. 38 ›› Issue (2) : 340-344.

Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 38(2): 340-344

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}

{{article.copyrightLicense_en}}

PDF(2701 KB)

Accesses

Citation

Detail

Sections

Recommended

/

〈

〉