Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

CAO Zheng-cai;YU Hong-xia;QIAO Fei

ACTA ELECTRONICA SINICA ›› 2010, Vol. 38 ›› Issue (2) : 340-344.

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ACTA ELECTRONICA SINICA ›› 2010, Vol. 38 ›› Issue (2) : 340-344.

Petri-Net and GA-Based Approach to Modeling and Optimize for Semiconductor Wafer Fabrication

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 38(2): 340-344.

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