Three-dimensional Simulation Study on the Electron Beam Lithography

Three-dimensional Simulation Study on the Electron Beam Lithography

SONG Hui-ying;YANG Rui;ZHAO Zhen-yu

ACTA ELECTRONICA SINICA ›› 2010, Vol. 38 ›› Issue (3) : 617-619.

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ACTA ELECTRONICA SINICA ›› 2010, Vol. 38 ›› Issue (3) : 617-619.

Three-dimensional Simulation Study on the Electron Beam Lithography

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 38(3): 617-619.

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