A Novel MEMS Inertial Sensor with the Actuators Drived by Lorentz Forcefor Increasing the Initial Sensing Capacitance

DONG Lin-xi;JIAO Ji-wei;YAN Hai-xia;SUN Ling-ling

Acta Electronica Sinica ›› 2010, Vol. 38 ›› Issue (5) : 1053-1057.

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Acta Electronica Sinica ›› 2010, Vol. 38 ›› Issue (5) : 1053-1057.
学术论文

A Novel MEMS Inertial Sensor with the Actuators Drived by Lorentz Forcefor Increasing the Initial Sensing Capacitance

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 38(5): 1053-1057

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