A Dual-Purpose Method to Enhance Heat Transfer and Prevent Notching Effect in Deep Reactive Ion Etching

DING Hai-tao;YANG Zhen-chuan;YAN Gui-zhen

ACTA ELECTRONICA SINICA ›› 2010, Vol. 38 ›› Issue (5) : 1201-1204.

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ACTA ELECTRONICA SINICA ›› 2010, Vol. 38 ›› Issue (5) : 1201-1204.
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A Dual-Purpose Method to Enhance Heat Transfer and Prevent Notching Effect in Deep Reactive Ion Etching

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 38(5): 1201-1204.

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