A Dual-Purpose Method to Enhance Heat Transfer and Prevent Notching Effect in Deep Reactive Ion Etching
DING Hai-tao;YANG Zhen-chuan;YAN Gui-zhen
Acta Electronica Sinica ›› 2010, Vol. 38 ›› Issue (5) : 1201-1204.
A Dual-Purpose Method to Enhance Heat Transfer and Prevent Notching Effect in Deep Reactive Ion Etching
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