Releasing Control Policy for Semiconductor Wafer Fabrication Based on Fuzzy Petri Nets-Reasoning

Releasing Control Policy for Semiconductor Wafer Fabrication Based on Fuzzy Petri Nets-Reasoning

CAO Zheng-cai;ZHAO Hui-dan;WANG Yong-ji

Acta Electronica Sinica ›› 2011, Vol. 39 ›› Issue (7) : 1545-1550.

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PDF(1012 KB)

Acta Electronica Sinica ›› 2011, Vol. 39 ›› Issue (7) : 1545-1550.

Releasing Control Policy for Semiconductor Wafer Fabrication Based on Fuzzy Petri Nets-Reasoning

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 39(7): 1545-1550

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