A 3-D Surface Evolvement Algorithm for Silicon Etching Simulations

A 3-D Surface Evolvement Algorithm for Silicon Etching Simulations

ZHANG Jian;QI Hao-chen;XU Dong-liang;HU Zhi-wen

ACTA ELECTRONICA SINICA ›› 2011, Vol. 39 ›› Issue (8) : 1869-1872.

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ACTA ELECTRONICA SINICA ›› 2011, Vol. 39 ›› Issue (8) : 1869-1872.

A 3-D Surface Evolvement Algorithm for Silicon Etching Simulations

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 39(8): 1869-1872.

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