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Overview of the Funding Status and Trends of NSFC Projects in Semiconductor Science and Information Devices During the 13
th
to 14
th
Five-Year Plan
TANG Hua, SHI Ge, HE Jie, LIU Ke
Acta Electronica Sinica . 2022, (
8
): 1992 -2002 . DOI: 10.12263/DZXB.20220867