An Impedance Analysis of MEMS Membrane Switches for X-Band Application

ZHENG Wei-bin; HUANG Qing-an; LIAO Xiao-ping; LI Fu-xiao

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An Impedance Analysis of MEMS Membrane Switches for X-Band Application

更新时间：2025-07-16

- An Impedance Analysis of MEMS Membrane Switches for X-Band Application
- Acta Electronica Sinica Vol. 31, Issue S1, Pages: 2213-2215(2003)
- 作者机构：
  
  1. 东南大学MEMS教育部重点实验室,江苏,南京,210096
  2. 南京电子器件研究所,江苏,南京,210016
  3. 东南大学MEMS教育部重点实验室,江苏,南京,210096
  4. 南京电子器件研究所,江苏,南京,210016
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN4TN713O357
- Published Online：25 December 2003，
  
  Published：2003
- 稿件说明：
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ZHENG Wei-bin, HUANG Qing-an, LIAO Xiao-ping, et al. An Impedance Analysis of MEMS Membrane Switches for X-Band Application[J]. Acta Electronica Sinica, 2003, 31(S1): 2213-2215.
DOI：

ZHENG Wei-bin, HUANG Qing-an, LIAO Xiao-ping, et al. An Impedance Analysis of MEMS Membrane Switches for X-Band Application[J]. Acta Electronica Sinica, 2003, 31(S1): 2213-2215. DOI：

摘要

射频微机械(RF MEMS)开关由于其优越的高频特性在微波和毫米波电路中表现出巨大的应用前景.但是目前对微机械开关的研究主要都集中在开关梁的结构设计和力学分析上

对开关的电磁特性的研究

尤其是开关高频阻抗匹配分析的研究与验证比较少.本文在高频传输线研究的基础上

推导出微机械开关的开态阻抗匹配模型

并利用HFSS软件对开关的高频特性进行模拟.其结果有助于设计高性能的RF MEMS开关.

Abstract

Microelectromechanical switches have demonstrated great potential in microwave and millimeter-wave circuits for their superior high-frequency performance.Most of researches on MEMS switches were concentrated on the structural design and mechanical analysis of their beams.There are few researches that have been done to analyze the electromagnetic characteristics of the MEMS switches

especially the high-frequency impedance matching of the switches.In this paper

the on-state impedance matching formulation of MEMS switches is developed based on the results of the high-frequency transmission line

and the electromagnetic characteristics of MEMS switches are confirmed by using the HFSS software.This helps to design high-performance RF MEMS switches.

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