A mechanics-magnetic coupling macromodel for a magnetic microactuator with a Multilevel Meander is presented

in which the deformation curve of a microbeam is approximated by linear combination of the cantilever-beam's modal function.The integration for magnetic force is calculated by dividing the microbeam into several intervals

and the nonlinear equation set has been developed based on the magnetic circuit principle.The complexity of the macromodel depends on the selection of modal number.In comparison with previous conventional models

this macromodel accounts for the coupling between the beam deflection and magnetic force.The macromodel in this paper is validated by comparing its results with experimental results available in some literatures.