Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers

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- Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers
- Acta Electronica Sinica Vol. 28, Issue 2, Pages: 122-123(2000)
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Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers[J]. Acta Electronica Sinica, 2000, 28(2): 122-123.
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Megnetically Actuated Micromachined Deflector with Structure of Multiple Nested Cantilevers[J]. Acta Electronica Sinica, 2000, 28(2): 122-123. DOI：

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