A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor[J]. Acta Electronica Sinica, 2000, 28(2): 59-61.
DOI:
A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor[J]. Acta Electronica Sinica, 2000, 28(2): 59-61.DOI:
A Study of Thermal Buckling Characteristics of Micro-double Layer Membrane Used in Resonant Sensor